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High-Resolution Differential Topography Measurement Using Adaptive Linnik Interferometry [Dataset]

Description

In order to validate a new sample alignment algorithm, measurements were performed by a home-built Linnik interferometer (100x, NA=0.90 and 133x, NA = 1,1). The dataset contains image stacks obtained by the Linnik interferometer. Two Measurements were carried out as an adaptive measurement where the reference object ist the same as the measurement object. The remaining measurements were carried out in a conventional manner with a plane mirror as reference.

If you use the data please refer to our corresponding article mentioned below.

Metadata

Authors
Dates
Created: 2025-01-15Available since: 2025-06-23
Relations
Is referenced by: Will be submitted later
DOI
https://doi.org/10.48662/daks-256
Faculty
FB16:Elektrotechnik/Informatik
Department
Fachgebiet Messtechnik
Language
en
Data types
Dataset
Keywords
Linnik InterferometerAdaptive InterferometryAutomatic AlignmentCross Correlation
DFG-subjects
407-02 Messsysteme
Funding
Funding Organisations:
Project Information:390307847440808121
License
http://creativecommons.org/licenses/by-nc-nd/3.0/de/
URI
https://daks.uni-kassel.de/handle/123456789/557
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Files
Document
Type
Size
Dataset_Adaptive_Interferometry.tar
8.36 GB
Stelter, Andre; Meyer, Christian; Käkel, Eireen; Hillmer, Hartmut; Lehmann, Peter. (2025). High-Resolution Differential Topography Measurement Using Adaptive Linnik Interferometry [Dataset]. DaKS. https://doi.org/10.48662/daks-256

License

Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Germany
Except where otherwised noted, this item's license is described as Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Germany